PSA Oxygen Generator (Pressure Swing Adsorption Oxygen Generator) is a key clean equipment in the semiconductor manufacturing industry. Based on high-precision Pressure Swing Adsorption (PSA) technology, it achieves deep purification through double-layer molecular sieves (ordinary molecular sieves + high-purity molecular sieves) to produce high-purity oxygen with a concentration of over 99.5%. It features core advantages such as stable purity, high cleanliness, reliable operation, and zero pollutant emissions, which can meet the stringent requirements for oxygen purity and cleanliness in processes such as oxidation and thin film deposition during semiconductor manufacturing. As the top-tier configuration for psa oxygen plant purity, the impurities (nitrogen, moisture, carbon dioxide, etc.) in the oxygen produced by this equipment are all controlled below the ppm level, avoiding a decrease in chip yield caused by insufficient oxygen purity. It is an indispensable core oxygen supply equipment for semiconductor manufacturing.
Product Parameters
| Output (Nm3/h) | Effective gas consumption ( Nm3/min ) | Air cleaning system | Inlet/outlet caliber(mm) |
| 5 | 0.78 | KJ-1 | DN25 | DN15 |
| 10 | 1.75 | KJ-2 | DN25 | DN15 |
| 20 | 3.55 | KJ-6 | DN40 | DN15 |
| 30 | 5.25 | KJ-6 | DN40 | DN25 |
| 40 | 7.0 | KJ-10 | DN50 | DN25 |
| 50 | 8.7 | KJ-10 | DN50 | DN25 |
| 60 | 10.5 | KJ-12 | DN50 | DN32 |
| 80 | 13.75 | KJ-20 | DN65 | DN40 |
| 100 | 16.64 | KJ-20 | DN65 | DN40 |
| 150 | 24.91 | KJ-30 | DN80 | DN40 |
| 200 | 33.37 | KJ-40 | DN100 | DN50 |
| 300 | 49.82 | KJ-60 | DN125 | DN50 |
Semiconductor manufacturing represents the pinnacle of precision manufacturing, with chip processes having entered the nanometer scale (5nm, 3nm). Any tiny impurities may cause chip short circuits, performance degradation, or yield reduction. Oxygen is mainly used in core processes such as oxidation (forming SiO₂ insulation layers) and Chemical Vapor Deposition (CVD) in semiconductor manufacturing. Oxygen purity directly affects the uniformity of insulation layer thickness, film adhesion, and chip electrical performance.
Ordinary industrial-grade oxygen (93% purity) contains impurities such as nitrogen and moisture that can form defects on the chip surface, leading to a 10-20% decrease in yield; in contrast, 99.5% high-purity oxygen can control impurity content below the ppm level, effectively avoiding defect formation and ensuring chip yield remains stable above 90%. The double-layer molecular sieve adsorption technology of the PSA Oxygen Generator can deeply remove impurities such as nitrogen, moisture, and carbon dioxide from the air. Its psa oxygen plant purity control precision far exceeds that of traditional oxygen generation equipment, fully meeting the process requirements of semiconductor manufacturing.
In addition, semiconductor manufacturing has extremely high requirements for oxygen cleanliness. The output gas must meet Class 100 cleanroom classification (no more than 100 particles ≥0.5μm per cubic foot of air). The PSA Oxygen Generator is equipped with a high-efficiency gas filtration system that can filter tiny particles in oxygen, avoiding particle contamination on the chip surface and further ensuring chip quality.
When purchasing PSA Oxygen Generator, semiconductor enterprises must adhere to four core principles: "qualified purity, cleanroom compatibility, stability and reliability, and complete supplier qualifications".
In terms of purity, it is imperative to select equipment with oxygen purity ≥99.5% and impurity content meeting semiconductor process requirements, and require suppliers to provide third-party test reports (such as SGS, ITS);
In terms of cleanroom compatibility, it is necessary to confirm that the output gas cleanliness of the equipment is ≥Class 100 and the equipment casing meets cleanroom installation requirements; in terms of stability and reliability, priority should be given to products with continuous operation time ≥8,000 hours/year and warranty for core components ≥3 years.
Supplier qualifications are crucial. It is necessary to select enterprises with psa based oxygen plant production qualifications, ISO9001 quality management system certification, and relevant semiconductor industry certifications (such as SEMI certification), and require them to provide successful cases in the semiconductor industry (such as cooperation cases with chip manufacturing and semiconductor packaging and testing enterprises). In addition, after-sales service must meet the high requirements of the semiconductor industry. Suppliers should be able to provide 24/7 technical support, regular on-site maintenance, and rapid spare parts supply to ensure long-term stable operation of the equipment.
With its 99.5% high-purity advantage, the PSA Oxygen Generator has become a benchmark for clean oxygen supply in semiconductor manufacturing. Its precise purity control, clean gas output, and stable operating performance can provide reliable oxygen supply support for semiconductor processes, making it a key equipment for chip manufacturing enterprises to improve yield and reduce costs.
In addition to PSA Oxygen Generators, we also produce VPSA Oxygen Generators, storage tanks, heat exchangers and other products. If you are interested in VPSA Oxygen Systems or other products, please feel free to send an email to info@gneeheatex.com. We will be very happy to serve you.
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